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Proceedings Paper

Response of polydimethylsiloxane (PDMS) to extreme ultraviolet light emitted from laser produced plasma
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Proc. SPIE 9511, Damage to VUV, EUV, and X-ray Optics V, 95110B; doi: 10.1117/12.2182392
Show Author Affiliations
Tetsuya Makimura, Univ. of Tsukuba (Japan)
Shuichi Torii, Univ. of Tsukuba (Japan)
Daisuke Nakamura, Kyushu Univ. (Japan)
Akihiko Takahashi, Kyushu Univ. (Japan)
Hiroyuki Niino, National Institute of Advanced Industrial Science and Technology (Japan)
Tatsuo Okada, Kyushu Univ. (Japan)


Published in SPIE Proceedings Vol. 9511:
Damage to VUV, EUV, and X-ray Optics V
Libor Juha; Saša Bajt; Richard London, Editor(s)

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