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Proceedings Paper

CoSi2/Si1-xGex interfaces for Schottky barrier infrared detectors with extended detection regime
Author(s): Sabine Kolodinski; Ricardo A. Donaton; Elisenda Roca; Matty Caymax; Karen Maex
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Paper Abstract

A CoSi2/strained-Si1-xGex-Schottky barrier detector is proposed for detection of infrared radiation in the 3 - 5 micrometers window. It could be a substitute for PtSi/Si-Schottky barrier detectors, which have already been integrated with readout electronics, but which imply the disadvantage of having the metal Pt in the line as a possible source of contamination. A silicidation study on strained Si1-xGex-layers with sacrificial Si-layers on top has been carried out to realize CoSi2/strained-Si1-xGex-interfaces, which will form the heart of the detector. The possibilities to integrate this detector with readout electronics are critically reviewed. First CoSi2/Si1-xGex-detectors have been processed which yield barrier heights as low as 229 meV.

Paper Details

Date Published: 1 September 1995
PDF: 10 pages
Proc. SPIE 2554, Growth and Characterization of Materials for Infrared Detectors II, (1 September 1995); doi: 10.1117/12.218186
Show Author Affiliations
Sabine Kolodinski, IMEC (Belgium)
Ricardo A. Donaton, IMEC (Belgium)
Elisenda Roca, IMEC (Spain)
Matty Caymax, IMEC (Belgium)
Karen Maex, IMEC (Belgium)


Published in SPIE Proceedings Vol. 2554:
Growth and Characterization of Materials for Infrared Detectors II
Randolph E. Longshore; Jan W. Baars; Avishai Kepten; John M. Trombetta, Editor(s)

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