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Proceedings Paper

Spectrum method for laser induced damage in dielectric thin films
Author(s): Yue Cai; Meng-lian Zhou; Zhi-liang Ma; Li-jun Wang
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Paper Abstract

This paper shows some tentative results with which laser induced damage on dielectric thin films is analyzed by using the transmission spectrum. The damage characters were extracted in high-resolution images of damaged films, and transmission spectrum of damaged thin films was measured. The mathematical model of transmission was built based on the matrix optics theory with the optical properties, which include the effective refractive index, effective extinction coefficient, effective thickness and wavelength, and so on. Changes of optical properties in different damaged degree were analyzed by the transmittance spectrum. Through which laser-induced damage mechanisms had been analyzed with the micro-examinations of films.

Paper Details

Date Published: 4 May 2015
PDF: 7 pages
Proc. SPIE 9543, Third International Symposium on Laser Interaction with Matter, 95430C (4 May 2015); doi: 10.1117/12.2181798
Show Author Affiliations
Yue Cai, Northwest Institute of Nuclear Technology (China)
Meng-lian Zhou, Northwest Institute of Nuclear Technology (China)
Zhi-liang Ma, Northwest Institute of Nuclear Technology (China)
Li-jun Wang, Northwest Institute of Nuclear Technology (China)


Published in SPIE Proceedings Vol. 9543:
Third International Symposium on Laser Interaction with Matter
Yury M. Andreev; Zunqi Lin; Xiaowu Ni; Xisheng Ye, Editor(s)

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