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Proceedings Paper

Equivalent common path method in large-scale laser comparator
Author(s): Mingzhao He; Jianshuang Li; Dongjing Miao
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Paper Abstract

Large-scale laser comparator is main standard device that providing accurate, reliable and traceable measurements for high precision large-scale line and 3D measurement instruments. It mainly composed of guide rail, motion control system, environmental parameters monitoring system and displacement measurement system. In the laser comparator, the main error sources are temperature distribution, straightness of guide rail and pitch and yaw of measuring carriage. To minimize the measurement uncertainty, an equivalent common optical path scheme is proposed and implemented. Three laser interferometers are adjusted to parallel with the guide rail. The displacement in an arbitrary virtual optical path is calculated using three displacements without the knowledge of carriage orientations at start and end positions. The orientation of air floating carriage is calculated with displacements of three optical path and position of three retroreflectors which are precisely measured by Laser Tracker. A 4th laser interferometer is used in the virtual optical path as reference to verify this compensation method. This paper analyzes the effect of rail straightness on the displacement measurement. The proposed method, through experimental verification, can improve the measurement uncertainty of large-scale laser comparator.

Paper Details

Date Published: 6 March 2015
PDF: 7 pages
Proc. SPIE 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation, 94463Y (6 March 2015); doi: 10.1117/12.2181536
Show Author Affiliations
Mingzhao He, National Institute of Metrology (China)
Jianshuang Li, National Institute of Metrology (China)
Dongjing Miao, National Institute of Metrology (China)


Published in SPIE Proceedings Vol. 9446:
Ninth International Symposium on Precision Engineering Measurement and Instrumentation
Junning Cui; Jiubin Tan; Xianfang Wen, Editor(s)

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