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Proceedings Paper

Multifunction surface measurement system based on focusing optical stylus interference and confocal image
Author(s): Fenfen Lin; Shuling Zhao; Suping Chang; Yanling Sun; Tiebang Xie
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Paper Abstract

In this paper a multifunction surface measurement system based on focusing optical stylus interference and confocal image is researched. This system is designed on the structure of optical interference microscopy and could accomplish two measurement functions of optical stylus scanning measurement and confocal image measurement. Optical path difference would vary with the surface and interference fringe from optical interference microscopy is detected by photo sensor, so optical stylus scanning measurement would be accomplished combining with the X-Y two-dimensional stage. While the reference path of the interference microscope is blocked and the confocal images of the measured surface from CCD is analyzed, confocal imaging measurement would be carried out by the nanometer scanning displacement stage. According to the performance analysis, optical stylus scanning measurement has the measurement range of 50μm and the vertical scanning resolution of 0.005μm, while confocal imaging measurement has the measurement rage of 2mm and the vertical scanning resolution of 1.5μm.

Paper Details

Date Published: 6 March 2015
PDF: 5 pages
Proc. SPIE 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation, 94463N (6 March 2015); doi: 10.1117/12.2181402
Show Author Affiliations
Fenfen Lin, Huazhong Univ. of Science and Technology (China)
Shuling Zhao, Senior Technical School of Zhumadian (China)
Suping Chang, Huazhong Univ. of Science and Technology (China)
Yanling Sun, Hubei Univ. of Arts and Sciences (China)
Tiebang Xie, Huazhong Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 9446:
Ninth International Symposium on Precision Engineering Measurement and Instrumentation
Junning Cui; Jiubin Tan; Xianfang Wen, Editor(s)

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