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Proceedings Paper

Coarse-fine vertical scanning based optical profiler for structured surface measurement with large step height
Author(s): Yi Zheng; Xiaojun Liu; Zili Lei; Qian Li; Xiao Yang; Liangzhou Chen; Wenlong Lu
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Paper Abstract

White light interference (WLI) optical profiler had been used widely for structured surface measurement. To achieve high measuring accuracy, piezoelectric ceramic (PZT) was usually used as the vertical scanning unit, which was normally less than 100um and only for small range structured surface measurement. With the development of advanced manufacturing technology, precision structured surfaces with large step height were appearing. To satisfy the measurement requirements of this kind of precision structured surfaces, WLI optical profiler with large range had to be developed. In this paper, an optical profiler was proposed, in which a coarse-fine vertical scanning system was adopted to expand its measurement range to 10mm while its resolution still at nanometer level.

Paper Details

Date Published: 6 March 2015
PDF: 6 pages
Proc. SPIE 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation, 94463G (6 March 2015); doi: 10.1117/12.2181368
Show Author Affiliations
Yi Zheng, Huazhong Univ. of Science and Technology (China)
Xiaojun Liu, Huazhong Univ. of Science and Technology (China)
Zili Lei, Huazhong Univ. of Science and Technology (China)
Qian Li, Huazhong Univ. of Science and Technology (China)
Xiao Yang, Huazhong Univ. of Science and Technology (China)
Liangzhou Chen, Huazhong Univ. of Science and Technology (China)
Wenlong Lu, Huazhong Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 9446:
Ninth International Symposium on Precision Engineering Measurement and Instrumentation
Junning Cui; Jiubin Tan; Xianfang Wen, Editor(s)

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