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Proceedings Paper

Experimental study on absolute measurement of spherical surfaces with shift-rotation method based on Zernike polynomials
Author(s): Weihong Song; Xi Hou; Fan Wu; Shibin Wu; Hongwei Jing
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Paper Abstract

Absolute testing methods have been widely employed in the accurate metrology of optical surface deviation. As a general method, the shift-rotation method requires several rotations and translations of the surface under test. And the surface deviation of the reference and the surface under test can be both calculated in terms of Zernike polynomials. The validity of the shift and rotation procedure was proved through experiments. Two different transmission spheres (with the same F number but different quality of the reference surfaces) were used to test the same spherical surface under test. The test results of the spherical surface under test are in good agreement.

Paper Details

Date Published: 6 March 2015
PDF: 4 pages
Proc. SPIE 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation, 94463F (6 March 2015); doi: 10.1117/12.2181363
Show Author Affiliations
Weihong Song, Institute of Optics and Electronics (China)
Xi Hou, Institute of Optics and Electronics (China)
Fan Wu, Institute of Optics and Electronics (China)
Shibin Wu, Institute of Optics and Electronics (China)
Hongwei Jing, Institute of Optics and Electronics (China)


Published in SPIE Proceedings Vol. 9446:
Ninth International Symposium on Precision Engineering Measurement and Instrumentation
Junning Cui; Jiubin Tan; Xianfang Wen, Editor(s)

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