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Proceedings Paper

A vertical scanning positioning system with large range and nanometer resolution for optical profiler
Author(s): Qian Li; Xiaojun Liu; Zili Lei; Yi Zheng; Liangzhou Chen; Wenlong Lu
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Paper Abstract

Piezoelectric ceramics with a flexible hinge guide was used for fine positioning at nanometer level, while a stepping motor was used for coarse positioning with a resolution at micrometer level, and their combination helped fulfillment of vertical scanning positioning with large range and nanometer resolution. A grating sensor was used for the real-time measurement of scanning displacement for close-loop positioning control. The properties of the flexible hinge guide was analyzed using ANSYS. Experimental results indicated the performance of the system was good. The system had a good application prospect in an optical profiler for surface measurement.

Paper Details

Date Published: 6 March 2015
PDF: 7 pages
Proc. SPIE 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation, 94463C (6 March 2015); doi: 10.1117/12.2181351
Show Author Affiliations
Qian Li, Huazhong Univ. of Science and Technology (China)
Xiaojun Liu, Huazhong Univ. of Science and Technology (China)
Zili Lei, Huazhong Univ. of Science and Technology (China)
Yi Zheng, Huazhong Univ. of Science and Technology (China)
Liangzhou Chen, Huazhong Univ. of Science and Technology (China)
Wenlong Lu, Huazhong Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 9446:
Ninth International Symposium on Precision Engineering Measurement and Instrumentation
Junning Cui; Jiubin Tan; Xianfang Wen, Editor(s)

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