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Proceedings Paper

Approaches to a dies decoupling during failure analysis of the 3D package integrated circuits
Author(s): G. Molodtsova; R. Milovanov; D. Zubov; E. Kelm
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Paper Abstract

During failure analysis of integrated circuits (IC), it is often necessary to have opportunity to inspect surface of die. But modern IC processing technology often provide integration of number of overlaping dies in one package (3D package type). In this case upper die complicate access to low die. Thus finding techniques which provide opportunity to inspect surface of each die is actual. In present work the approaches to a die decoupling based on the exposure to fuming nitric acid (FNA) and temperature cycling of IC are considered. The experiments, carried out for 32 GB flash-drive, have shown the possibility of applying mentioned approaches to a die decoupling.

Paper Details

Date Published: 18 December 2014
PDF: 6 pages
Proc. SPIE 9440, International Conference on Micro- and Nano-Electronics 2014, 94400M (18 December 2014); doi: 10.1117/12.2181199
Show Author Affiliations
G. Molodtsova, Institute of Nanotechnology of Microelectronics (Russian Federation)
R. Milovanov, Institute of Nanotechnology of Microelectronics (Russian Federation)
D. Zubov, Institute of Nanotechnology of Microelectronics (Russian Federation)
E. Kelm, Institute of Nanotechnology of Microelectronics (Russian Federation)


Published in SPIE Proceedings Vol. 9440:
International Conference on Micro- and Nano-Electronics 2014
Alexander A. Orlikovsky, Editor(s)

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