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Proceedings Paper

A high-resolution detecting system based on machine vision for defects on large aperture and super-smooth surface
Author(s): Yongying Yang; Limin Zhao; Shitong Wang; Pin Cao; Dong Liu; Lu Li; Lu Yan; Chen Li; Shibing Xie; Yang Li; Yangjie Chen
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Paper Abstract

The high-resolution detecting system based on machine vision for defects on large aperture and super-smooth surface uses a novel ring telecentric lighting optical system detecting the defects on the sample all round and without blind spots. The scattering light induced by surface defects enters the adaptive and highly zoom microscopic scattering dark-field imaging system for defect detecting and then forms digital images. Sub-aperture microscopic scanning sampling and fast stitching on the surface is realized by using precise multi-axis shifting guided scanning system and a standard comparison board based upon binary optics is used to implement fast calibration of micron-dimension defects detected actually. The pattern recognition technology of digital image processing which can automatically output digitalized surface defects statements after scaling is established to comprehensively evaluate defects. This system which can reach micron-dimension defect resolution can achieve detections of large aperture components of 850 mm × 500 mm, solve the durable problem of subjective uncertainty brought in by human visual detection of defects and achieve quantitative detection of defects with machine vision.

Paper Details

Date Published: 6 March 2015
PDF: 8 pages
Proc. SPIE 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation, 94462N (6 March 2015); doi: 10.1117/12.2181182
Show Author Affiliations
Yongying Yang, Zhejiang Univ. (China)
Limin Zhao, Zhejiang Univ. (China)
Shitong Wang, Zhejiang Univ. (China)
Pin Cao, Zhejiang Univ. (China)
Dong Liu, Zhejiang Univ. (China)
Lu Li, Zhejiang Univ. (China)
Lu Yan, Zhejiang Univ. (China)
Chen Li, Zhejiang Univ. (China)
Shibing Xie, Zhejiang Univ. (China)
Hangzhou Zernike Optical Technology Co., Ltd. (China)
Yang Li, Zhejiang Univ. (China)
Hangzhou Zernike Optical Technology Co., Ltd. (China)
Yangjie Chen, Hangzhou Zernike Optical Technology Co., Ltd. (China)


Published in SPIE Proceedings Vol. 9446:
Ninth International Symposium on Precision Engineering Measurement and Instrumentation
Junning Cui; Jiubin Tan; Xianfang Wen, Editor(s)

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