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Proceedings Paper

Design and development of measuring device for beam pointing and positional errors in multi-axes laser interferometric systems
Author(s): Pengcheng Hu; Yifei Zhang; Ting Wu; Guibin Yuan
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Paper Abstract

The mechanism of Abbe error and cosine error resulting from beam pointing and positional errors in a laser interference measurement system was analyzed, a PSD-based measurement method was proposed to measure both errors simultaneously. A light intensity adaptive measuring device was designed for measurement of pointing and positional errors. Experimental results indicated that the measuring range and resolution of the position deviation could reach ±4.5mm and 1μm respectively; the angular range and resolution could reach ±0.112rad and 25μrad.

Paper Details

Date Published: 6 March 2015
PDF: 7 pages
Proc. SPIE 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation, 94462G (6 March 2015); doi: 10.1117/12.2181146
Show Author Affiliations
Pengcheng Hu, Harbin Institute of Technology (China)
Yifei Zhang, Harbin Institute of Technology (China)
Ting Wu, Harbin Institute of Technology (China)
Guibin Yuan, Harbin Institute of Technology (China)


Published in SPIE Proceedings Vol. 9446:
Ninth International Symposium on Precision Engineering Measurement and Instrumentation
Junning Cui; Jiubin Tan; Xianfang Wen, Editor(s)

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