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Proceedings Paper

Measurement of centering error for probe of swing arm profilometer using a spectral confocal sensor
Author(s): Lin Chen; Hongwei Jing; Zhongwei Wei; Xuedong Cao
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Paper Abstract

A spectral confocal sensor was used to measure the centering error for probe of swing arm profilometer (SAP). The feasibility of this technology was proved through simulation and experiment. The final measurement results was also analyzed to evaluate the advantages and disadvantages of this technology.

Paper Details

Date Published: 6 March 2015
PDF: 7 pages
Proc. SPIE 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation, 944621 (6 March 2015); doi: 10.1117/12.2180887
Show Author Affiliations
Lin Chen, Institute of Optics and Electronics (China)
Univ. of Chinese Academy of Sciences (China)
Hongwei Jing, Institute of Optics and Electronics (China)
Zhongwei Wei, Institute of Optics and Electronics (China)
Univ. of Chinese Academy of Sciences (China)
Xuedong Cao, Institute of Optics and Electronics (China)


Published in SPIE Proceedings Vol. 9446:
Ninth International Symposium on Precision Engineering Measurement and Instrumentation
Junning Cui; Jiubin Tan; Xianfang Wen, Editor(s)

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