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Proceedings Paper

Development of driving setup for micromechanical friction vacuum gauge
Author(s): Anton N. Boyko; Andrei S. Shalimov; Sergei P. Timoshenkov; Pavel B. Kovyrkin
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Paper Abstract

The results of development of driving setup for micromechanical friction vacuum gauge are presented. For driving of the micromechanical transducer the saw-tooth signal was used because of its good repeatability and possibility of automatic operation. Specialized switching card for resonator driving and output signal processing was developed and implemented. Experimental setup consists of PC, electric switching card and oscilloscope was used to explore damped and overdamped oscillations. The study exhibits stable repeatability of driving procedure. Resonator eigenfrequency agrees with calculated value and confirms that oscillations correspond to the main mode. The results can be applied for creation of micromechanical friction vacuum gauges.

Paper Details

Date Published: 18 December 2014
PDF: 7 pages
Proc. SPIE 9440, International Conference on Micro- and Nano-Electronics 2014, 94400U (18 December 2014); doi: 10.1117/12.2180876
Show Author Affiliations
Anton N. Boyko, National Research Univ. of Electronic Technology (Russian Federation)
Andrei S. Shalimov, National Research Univ. of Electronic Technology (Russian Federation)
Sergei P. Timoshenkov, National Research Univ. of Electronic Technology (Russian Federation)
Pavel B. Kovyrkin, National Research Univ. of Electronic Technology (Russian Federation)


Published in SPIE Proceedings Vol. 9440:
International Conference on Micro- and Nano-Electronics 2014
Alexander A. Orlikovsky, Editor(s)

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