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Proceedings Paper

Non-contact measurement for profile of different diameter micro/mini holes with capacitance sensor
Author(s): Liyan Zhu; Wen Wang; Keqing Lu; Zongwei Fan
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Paper Abstract

Now the basic structures of capacitive sensors always use cylindrical fixed electrodes and the measurement for different diameter hole requires different specifications of sensor probe. For the shortfall of the measurement method for hole profile with capacitive sensor, this paper introduces the principle of capacitive sensor for micro/mini hole measurement and the capacitance-based device used in different diameter micro/mini holes’ profile measurement through the structural improvements of the capacitive sensor probe, then simulation and error analysis are conducted. The simulation results indicate the error is less than 5%, and it verifies the feasibility of the profile measurement principle for different diameter hole with capacitance sensor.

Paper Details

Date Published: 6 March 2015
PDF: 5 pages
Proc. SPIE 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation, 94461U (6 March 2015); doi: 10.1117/12.2180844
Show Author Affiliations
Liyan Zhu, Hangzhou Dianzi Univ. (China)
Wen Wang, Hangzhou Dianzi Univ. (China)
Keqing Lu, Hangzhou Dianzi Univ. (China)
Zongwei Fan, Hangzhou Dianzi Univ. (China)


Published in SPIE Proceedings Vol. 9446:
Ninth International Symposium on Precision Engineering Measurement and Instrumentation
Junning Cui; Jiubin Tan; Xianfang Wen, Editor(s)

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