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Proceedings Paper

Optically transparent fluoro-containing polyimide films with low dielectric permeability
Author(s): V. Kravtsova; M. Umersakova; R. Iskakov; O. Prikhodko; N. Korobova
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Paper Abstract

Optical, dielectric, thermal, physico-mechanical properties of new fluoro-containing alicyclic polyimides were investigated. High optical transparency in visible and UV ranges of the films with thickness 10-25 μm, which lower boundary was registered at 125-260 nm; as well as reflectivity index being 1.492-1.515 were recorded. Dielectric permeability was characterized with low rates and stability up to 300 °С depending on chemical structure. Polyimides were stable with heating in air up to 320-380 °С. Prepared films show break tensile at 145 MPa with elongation up to 50% due to the excellent film-forming properties. Films based on polyimides with polyaniline composition demonstrates reflectivity index 1.60.

Paper Details

Date Published: 18 December 2014
PDF: 6 pages
Proc. SPIE 9440, International Conference on Micro- and Nano-Electronics 2014, 944003 (18 December 2014); doi: 10.1117/12.2180429
Show Author Affiliations
V. Kravtsova, A.B. Bekturov Institute of Chemical Science (Kazakhstan)
M. Umersakova, A.B. Bekturov Institute of Chemical Science (Kazakhstan)
R. Iskakov, Kazakh-British Technical Univ. (Kazakhstan)
O. Prikhodko, Al-Farabi Kazakh National Univ. (Kazakhstan)
N. Korobova, National Research Univ. of Electronic Technology (Russian Federation)


Published in SPIE Proceedings Vol. 9440:
International Conference on Micro- and Nano-Electronics 2014
Alexander A. Orlikovsky, Editor(s)

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