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Proceedings Paper

Electrothermal piezoresistive cantilever resonators for personal measurements of nanoparticles in workplace exposure
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Paper Abstract

Low-cost and low-power piezoresistive cantilever resonators with integrated electrothermal heaters are developed to support the sensing module enhancement of the second generation of handheld cantilever-based airborne nanoparticle (NP) detector (CANTOR-2). These sensors are used for direct-reading of exposure to carbon engineered nanoparticles (ENPs) at indoor workplaces. The cantilever structures having various shapes of free ends are created using silicon bulk micromachining technologies (i.e, rectangular, hammer-head, triangular, and U-shaped cantilevers). For a complete wearable CANTOR-2, all components of the proposed detector can be grouped into two main units depending on their packaging placements (i.e., the NP sampler head and the electronics mounted in a handy-format housing). In the NP sampler head, a miniaturized electrophoretic aerosol sampler and a resonant silicon cantilever mass sensor are employed to collect the ENPs from the air stream to the cantilever surfaces and measuring their mass concentration, respectively. After calibration, the detected ENP mass concentrations of CANTOR-2 show a standard deviation from fast mobility particle sizer (FMPS, TSI 3091) of 8–14%.

Paper Details

Date Published: 21 May 2015
PDF: 8 pages
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95170B (21 May 2015); doi: 10.1117/12.2180151
Show Author Affiliations
Hutomo Suryo Wasisto, Technische Univ. Braunschweig (Germany)
Wenze Wu, Technische Univ. Braunschweig (Germany)
Fraunhofer-Wilhelm-Klauditz Institut (Germany)
Erik Uhde, Fraunhofer-Wilhelm-Klauditz-Institut (Germany)
Andreas Waag, Technische Univ. Braunschweig (Germany)
Erwin Peiner, Technische Univ. Braunschweig (Germany)


Published in SPIE Proceedings Vol. 9517:
Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems
José Luis Sánchez-Rojas; Riccardo Brama, Editor(s)

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