Share Email Print
cover

Proceedings Paper

C-MEMS for bio-sensing applications
Author(s): Yin Song; Richa Agrawal; Chunlei Wang
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

Developing highly sensitive, selective, and reproducible miniaturized bio-sensing platforms require reliable biointerface which should be compatible with microfabrication techniques. In this study, we have fabricated pyrolyzed carbon arrays with high surface area as a bio-sensing electrode, and developed the surface functionalization methods to increase biomolecules immobilization efficiency and further understand electrochemical phenomena at biointerfaces. The carbon microelectrode arrays with high aspect ratio have been fabricated by carbon microelectromechanical systems (C-MEMS) and nanomaterials such as graphene have been integrated to further increase surface area. To achieve the efficient covalent immobilization of biomolecules, various oxidation and reduction functionalization methods have been investigated. The oxidation treatment in this study includes vacuum ultraviolet, electrochemical activation, UV/Ozone and oxygen RIE. The reduction treatment includes direct amination and diazonium grafting. The developed bio-sensing platform was then applied for several applications, such as: DNA sensor; H2O2 sensor; aptamer sensor and HIV sensor.

Paper Details

Date Published: 18 May 2015
PDF: 8 pages
Proc. SPIE 9493, Energy Harvesting and Storage: Materials, Devices, and Applications VI, 94930I (18 May 2015); doi: 10.1117/12.2180127
Show Author Affiliations
Yin Song, Florida International Univ. (United States)
Richa Agrawal, Florida International Univ. (United States)
Chunlei Wang, Florida International Univ. (United States)


Published in SPIE Proceedings Vol. 9493:
Energy Harvesting and Storage: Materials, Devices, and Applications VI
Nibir K. Dhar; Achyut K. Dutta, Editor(s)

© SPIE. Terms of Use
Back to Top