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Proceedings Paper

Carbon microelectromechanical systems (C-MEMS) based microsupercapacitors
Author(s): Richa Agrawal; Majid Beidaghi; Wei Chen; Chunlei Wang
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Paper Abstract

The rapid development in miniaturized electronic devices has led to an ever increasing demand for high-performance rechargeable micropower scources. Microsupercapacitors in particular have gained much attention in recent years owing to their ability to provide high pulse power while maintaining long cycle lives. Carbon microelectromechanical systems (C-MEMS) is a powerful approach to fabricate high aspect ratio carbon microelectrode arrays, which has been proved to hold great promise as a platform for energy storage. C-MEMS is a versatile technique to create carbon structures by pyrolyzing a patterned photoresist. Furthermore, different active materials can be loaded onto these microelectrode platforms for further enhancement of the electrochemical performance of the C-MEMS platform. In this article, different techniques and methods in order to enhance C-MEMS based various electrochemical capacitor systems have been discussed, including electrochemical activation of C-MEMS structures for miniaturized supercapacitor applications, integration of carbon nanostructures like carbon nanotubes onto C-MEMS structures and also integration of pseudocapacitive materials such as polypyrrole onto C-MEMS structures.

Paper Details

Date Published: 18 May 2015
PDF: 7 pages
Proc. SPIE 9493, Energy Harvesting and Storage: Materials, Devices, and Applications VI, 94930C (18 May 2015); doi: 10.1117/12.2180122
Show Author Affiliations
Richa Agrawal, Florida International Univ. (United States)
Majid Beidaghi, Drexel Univ. (United States)
Wei Chen, King Abdullah Univ. of Science and Technology (Saudi Arabia)
Chunlei Wang, Florida International Univ. (United States)


Published in SPIE Proceedings Vol. 9493:
Energy Harvesting and Storage: Materials, Devices, and Applications VI
Nibir K. Dhar; Achyut K. Dutta, Editor(s)

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