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Proceedings Paper

Tailoring design and fabrication of capacitive RF MEMS switches for K-band applications
Author(s): Fabio Quaranta; Anna Persano; Giovanni Capoccia; Antonietta Taurino; Adriano Cola; Pietro Siciliano; Andrea Lucibello; Romolo Marcelli; Emanuela Proietti; Alvise Bagolini; Benno Margesin; Pierluigi Bellutti; Jacopo Iannacci
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Paper Abstract

Shunt capacitive radio-frequency microelectromechanical (RF MEMS) switches were modelled, fabricated and characterized in the K-band domain. Design allowed to predict the RF behaviour of the switches as a function of the bridge geometric parameters. The modelled switches were fabricated on silicon substrate, using a surface micromachining approach. In addition to the geometric parameters, the material structure in the bridge-actuator area was modified for switches fabricated on the same wafer, thanks to the removal/addition of two technological steps of crucial importance for RF MEMS switches performance, which are the use of the sacrificial layer and the deposition of a floating metal layer on the actuator. Surface profilometry analysis was used to check the material layer structure in the different regions of the bridge area as well as to investigate the mechanical behaviour of the moveable bridge under the application of a loaded force. The RF behaviour of all the fabricated switches was measured, observing the impact on the isolation of the manipulation of the bridge size and of the variations in the fabrication process.

Paper Details

Date Published: 21 May 2015
PDF: 8 pages
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95170S (21 May 2015); doi: 10.1117/12.2179867
Show Author Affiliations
Fabio Quaranta, Institute for Microelectronics and Microsystems, CNR (Italy)
Anna Persano, Institute for Microelectronics and Microsystems, CNR (Italy)
Giovanni Capoccia, Institute for Microelectronics and Microsystems, CNR (Italy)
Antonietta Taurino, Institute for Microelectronics and Microsystems, CNR (Italy)
Adriano Cola, Institute for Microelectronics and Microsystems, CNR (Italy)
Pietro Siciliano, Institute for Microelectronics and Microsystems, CNR (Italy)
Andrea Lucibello, Institute for Microelectronics and Microsystems, CNR (Italy)
Romolo Marcelli, Institute for Microelectronics and Microsystems, CNR (Italy)
Emanuela Proietti, Institute for Microelectronics and Microsystems, CNR (Italy)
Alvise Bagolini, Fondazione Bruno Kessler (Italy)
Benno Margesin, Fondazione Bruno Kessler (Italy)
Pierluigi Bellutti, Fondazione Bruno Kessler (Italy)
Jacopo Iannacci, Fondazione Bruno Kessler (Italy)


Published in SPIE Proceedings Vol. 9517:
Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems
José Luis Sánchez-Rojas; Riccardo Brama, Editor(s)

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