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Proceedings Paper

Electrostatically actuated MEMS switch with resistive contact
Author(s): Ilya V. Uvarov; Victor V. Naumov; Roman V. Selyukov
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Paper Abstract

MEMS switch with the electrostatic actuation and the resistive contact was fabricated using surface micromachining. The movable electrode of the switch was the three-layer metallic cantilever having nanoscale thickness and high lengthto- thickness ratio. Low stiffness of the cantilever allowed to approach relatively low values of the actuation voltage. The theoretical analysis and experimental study of the switching characteristics was performed.

Paper Details

Date Published: 18 December 2014
PDF: 8 pages
Proc. SPIE 9440, International Conference on Micro- and Nano-Electronics 2014, 94400W (18 December 2014); doi: 10.1117/12.2179558
Show Author Affiliations
Ilya V. Uvarov, Institute of Physics and Technology, Yaroslavl Branch (Russian Federation)
Victor V. Naumov, Institute of Physics and Technology, Yaroslavl Branch (Russian Federation)
Roman V. Selyukov, Institute of Physics and Technology, Yaroslavl Branch (Russian Federation)


Published in SPIE Proceedings Vol. 9440:
International Conference on Micro- and Nano-Electronics 2014
Alexander A. Orlikovsky, Editor(s)

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