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Proceedings Paper

Study of a sensor based on the series of micro-rings with dual coupling points
Author(s): Xin Li; Shiliang Guo; Ruiqi Piao; Ming Yang
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Paper Abstract

A novel type of humidity sensor based on the series of micro-rings with the same radius is proposed, and the humidity is measured by detecting the spectrum drift. Experimental results show the sensitivity can achieve about 16pm/10%RH and the sensing range of the humidity sensor is 10~60%RH. The proposed structure will provide an effective way for integrated humidity sensors with simple structure, high sensitivity and low cost.

Paper Details

Date Published: 13 April 2015
PDF: 4 pages
Proc. SPIE 9522, Selected Papers from Conferences of the Photoelectronic Technology Committee of the Chinese Society of Astronautics 2014, Part II, 95220P (13 April 2015); doi: 10.1117/12.2179267
Show Author Affiliations
Xin Li, Harbin Institute of Technology (China)
Shiliang Guo, Yanshan Univ. (China)
Ruiqi Piao, Yanshan Univ. (China)
Ming Yang, Harbin Institute of Technology (China)


Published in SPIE Proceedings Vol. 9522:
Selected Papers from Conferences of the Photoelectronic Technology Committee of the Chinese Society of Astronautics 2014, Part II
Xiangwan Du; Jennifer Liu; Dianyuan Fan; Jialing Le; Yueguang Lv; Jianquan Yao; Weimin Bao; Lijun Wang, Editor(s)

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