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Proceedings Paper

Photoacoustic CO2 sensor system: design and potential for miniaturization and integration in silicon
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Paper Abstract

The detection of CO2 indoors has a large impact on today’s sensor market. The ambient room climate is important for human health and wellbeing. The CO2 concentration is a main indicator for indoor climate and correlates with the number of persons inside a room. People in Europe spend more than 90% of their time indoors. This leads to a high demand for miniaturized and energy efficient CO2 sensors. To realize small and energy-efficient mass-market sensors, we develop novel miniaturized photoacoustic sensor systems with optimized design for real-time and selective CO2 detection. The sensor system consists of two chambers, a measurement and a detection chamber. The detection chamber consists of an integrated pressure sensor under special gas atmosphere. As pressure sensor we use a commercially available cell phone microphone. We describe a possible miniaturization process of the developed system by regarding the possibility of integration of all sensor parts. The system is manufactured in precision mechanics with IR-optical sapphire windows as optical connections. During the miniaturization process the sapphire windows are replaced by Si chips with a special IR anti-reflection coating. The developed system is characterized in detail with gas measurements and optical transmission investigations. The results of the characterization process offer a high potential for further miniaturization with high capability for mass market applications.

Paper Details

Date Published: 21 May 2015
PDF: 6 pages
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 951715 (21 May 2015); doi: 10.1117/12.2179157
Show Author Affiliations
J. Huber, Univ. of Freiburg (Germany)
Fraunhofer Institute for Physical Measurement Techniques (Germany)
J. Wöllenstein, Univ. of Freiburg (Germany)
Fraunhofer Institute for Physical Measurement Techniques (Germany)


Published in SPIE Proceedings Vol. 9517:
Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems
José Luis Sánchez-Rojas; Riccardo Brama, Editor(s)

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