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Proceedings Paper

The next generation of MEMS-based optical microspectrometers
Author(s): Reinoud F. Wolffenbuttel
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Paper Abstract

MEMS-based optical microspectrometers are typically composed of MEMS devices for operation as dispersive element or as tunable resonator within an optical system. CMOS-compatible MEMS technologies enable on-chip integration of the MEMS optical components, detector and readout circuits. The actual realization and exploitation of this on-chip functional integration of the entire microspectrometer imposes several challenges. The state-of-the-art and some of the technology and design challenges will be outlined, followed by an introduction to some of the trends and upcoming application of high potential.

Paper Details

Date Published: 21 May 2015
PDF: 12 pages
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95170I (21 May 2015); doi: 10.1117/12.2179059
Show Author Affiliations
Reinoud F. Wolffenbuttel, Technische Univ. Delft (Netherlands)


Published in SPIE Proceedings Vol. 9517:
Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems
José Luis Sánchez-Rojas; Riccardo Brama, Editor(s)

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