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Proceedings Paper

Nanopatterning of titanium oxide thin films using inductively coupled plasma for gas detection
Author(s): Ivan Hotovy; Ivan Kostic; Stefan Hascik; Vlastimil Rehacek; Martin Predanocy
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Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95171D; doi: 10.1117/12.2179000
Show Author Affiliations
Ivan Hotovy, Slovenska Technicka Univ. (Slovakia)
Ivan Kostic, Slovak Academy of Sciences (Slovakia)
Stefan Hascik, Slovak Academy of Sciences (Slovakia)
Vlastimil Rehacek, Slovenska Technicka Univ. (Slovakia)
Martin Predanocy, Slovenska Technicka Univ. (Slovakia)


Published in SPIE Proceedings Vol. 9517:
Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems
José Luis Sánchez-Rojas; Riccardo Brama, Editor(s)

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