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Proceedings Paper

Multifunctional thin film sensor system as monitoring system in production
Author(s): Saskia Biehl; Christian Rumposch; Nancy Paetsch
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Paper Abstract

The two most important measurement categories in production are temperature and load. Therefore commercial sensors are applied in machinery as near as possible to the working parts. For a cost efficient production the integration of sensor elements directly on top of the surface in the heavily loaded regions is essential to get the real temperature and load distributions during the production process. Therefore a new multifunctional thin film sensor system is in development. This multilayer system combines thermoresistive sensor structures with piezoresistive ones and exists out of wear resistant carbon based layers [1, 2, 3, 4, 5]. The sensor data will lead to a deeper process understanding, to optimization of simulation tools, to reduction of rejects and to an improvement of flexibility in production.

Paper Details

Date Published: 21 May 2015
PDF: 10 pages
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95170Y (21 May 2015); doi: 10.1117/12.2178914
Show Author Affiliations
Saskia Biehl, Fraunhofer Institute for Surface Engineering and Thin Films (Germany)
Christian Rumposch, Fraunhofer Institute for Surface Engineering and Thin Films (Germany)
Nancy Paetsch, Fraunhofer Institute for Surface Engineering and Thin Films (Germany)


Published in SPIE Proceedings Vol. 9517:
Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems
José Luis Sánchez-Rojas; Riccardo Brama, Editor(s)

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