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Proceedings Paper

EUV ablation: a study of the process
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Paper Abstract

An investigation on short-wavelength ablation mechanism of poly(1,4-phenylene ether ether-sulfune) PPEESand poly (1-hexadecene-sulfone) PHDS (Figure 9-10) by EUV radiation is presented. The goal of this work is to evaluate the ablation behavior with respect to the influence of wavelength, fluence and quantum efficiency. Because there is no yet a general EUV ablation theory, data are analyzed in order to underline regularity of the process which can be used in future to detect the scaling laws of the process. The differences with longer wavelengths ablation and EUV one are pointed out and possible applications of EUV ablation are proposed.

Paper Details

Date Published: 12 May 2015
PDF: 11 pages
Proc. SPIE 9510, EUV and X-ray Optics: Synergy between Laboratory and Space IV, 951011 (12 May 2015); doi: 10.1117/12.2178868
Show Author Affiliations
Chiara Liberatore, Institute of Physics of the ASCR, v.v.i. (Czech Republic)
Czech Technical Univ. in Prague (Czech Republic)
Andrzej Bartnik, Military Univ. of Technology (Poland)
Inam Ul Ahad, Military Univ. of Technology (Poland)
Martina Toufarová, Czech Technical Univ. in Prague (Czech Republic)
Institute of Physics of the ASCR, v.v.i. (Czech Republic)
Irena Matulková, Institute of Physics of the ASCR, v.v.i. (Czech Republic)
Věra Hájková, Institute of Physics of the ASCR, v.v.i. (Czech Republic)
Luděk Vyšín, Czech Technical Univ. in Prague (Czech Republic)
Institute of Physics of the ASCR, v.v.i. (Czech Republic)
Tomáš Burian, Institute of Physics of the ASCR, v.v.i. (Czech Republic)
Libor Juha, Institute of Physics of the ASCR, v.v.i. (Czech Republic)
Ladislav Pina, Czech Technical Univ. in Prague (Czech Republic)
Akira Endo, Institute of Physics of the ASCR, v.v.i. (Czech Republic)
Tomas Mocek, Institute of Physics of the ASCR, v.v.i. (Czech Republic)


Published in SPIE Proceedings Vol. 9510:
EUV and X-ray Optics: Synergy between Laboratory and Space IV
René Hudec; Ladislav Pina, Editor(s)

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