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Proceedings Paper

Optical design and characterization of a gas filled MEMS Fabry-Perot filter
Author(s): N. Pelin Ayerden; Mohammadamir Ghaderi; Ger de Graaf; Reinoud F. Wolffenbuttel
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Paper Abstract

A concept for a highly integrated and miniaturized gas sensor based on infrared absorption, a Fabry-Perot type linear variable optical filter with integrated gas cell, is presented. The sample chamber takes up most of the space in a conventional spectrometer and is the only component that has so far not been miniaturized. In this concept the gas cell is combined with the resonator cavity of the filter. The optical design, fabrication, and characterization results on a MEMSbased realization are reported for a 24-25.5 μm long tapered resonator cavity. Multiple reflections from highly reflective mirrors enable this optical cavity to also act as a gas cell with an equivalent optical absorption path length of 8 mm. Wideband operation of the filter is ensured by fabrication of a tapered mirror. In addition to the functional integration and significant size reduction, the filter contains no moving parts, thus enables the fabrication of a robust microspectrometer

Paper Details

Date Published: 21 May 2015
PDF: 8 pages
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95171N (21 May 2015); doi: 10.1117/12.2178773
Show Author Affiliations
N. Pelin Ayerden, Technische Univ. Delft (Netherlands)
Mohammadamir Ghaderi, Technische Univ. Delft (Netherlands)
Ger de Graaf, Technische Univ. Delft (Netherlands)
Reinoud F. Wolffenbuttel, Technische Univ. Delft (Netherlands)


Published in SPIE Proceedings Vol. 9517:
Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems
José Luis Sánchez-Rojas; Riccardo Brama, Editor(s)

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