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Proceedings Paper

The effect of substrate temperature on femtosecond laser induced nanostructures on silicon
Author(s): Guoliang Deng; Xianheng Yang; Guoying Feng; Shouhuan Zhou
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Paper Details

Date Published:
Proc. SPIE 9516, Integrated Optics: Physics and Simulations II, ; doi: 10.1117/12.2178641
Show Author Affiliations
Guoliang Deng, Sichuan Univ. (China)
Xianheng Yang, Sichuan Univ. (China)
Guoying Feng, Sichuan Univ. (China)
Shouhuan Zhou, Sichuan Univ. (China)

Published in SPIE Proceedings Vol. 9516:
Integrated Optics: Physics and Simulations II
Pavel Cheben; Jiří Čtyroký; Iñigo Molina-Fernández, Editor(s)

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