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Proceedings Paper

Material properties of lithium fluoride for predicting XUV laser ablation rate and threshold fluence
Author(s): Tomáš Blejchař; Václav Nevrlý; Michal Vašinek; Michal Dostál; Lukáš Pečínka; Jakub Dlabka; Martin Stachoň; Libor Juha; Petr Bitala; Zdeněk Zelinger; Peter Pira; Jan Wild
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Paper Abstract

This paper deals with prediction of extreme ultraviolet (XUV) laser ablation of lithium fluoride at nanosecond timescales. Material properties of lithium fluoride were determined based on bibliographic survey. These data are necessary for theoretical estimation of surface removal rate in relevance to XUV laser desorption/ablation process. Parameters of XUV radiation pulses generated by the Prague capillary-discharge laser (CDL) desktop system were assumed in this context. Prediction of ablation curve and threshold laser fluence for lithium fluoride was performed employing XUV-ABLATOR code. Quasi-random sampling approach was used for evaluating its predictive capabilities in the means of variance and stability of model outputs in expected range of uncertainties. These results were compared to experimental data observed previously.

Paper Details

Date Published: 12 May 2015
PDF: 9 pages
Proc. SPIE 9511, Damage to VUV, EUV, and X-ray Optics V, 95110K (12 May 2015); doi: 10.1117/12.2178437
Show Author Affiliations
Tomáš Blejchař, VŠB-Technical Univ. of Ostrava (Czech Republic)
Václav Nevrlý, VŠB-Technical Univ. of Ostrava (Czech Republic)
Michal Vašinek, VŠB-Technical Univ. of Ostrava (Czech Republic)
Michal Dostál, VŠB-Technical Univ. of Ostrava (Czech Republic)
J. Heyrovský Institute of Physical Chemistry of the ASCR v.v.i. (Czech Republic)
Lukáš Pečínka, VŠB-Technical Univ. of Ostrava (Czech Republic)
J. Heyrovský Institute of Physical Chemistry of the ASCR v.v.i. (Czech Republic)
Jakub Dlabka, VŠB-Technical Univ. of Ostrava (Czech Republic)
Martin Stachoň, VŠB-Technical Univ. of Ostrava (Czech Republic)
Libor Juha, Institute of Physics of the ASCR v.v.i. (Czech Republic)
Petr Bitala, VŠB-Technical Univ. of Ostrava (Czech Republic)
Zdeněk Zelinger, J. Heyrovský Institute of Physical Chemistry of the ASCR v.v.i. (Czech Republic)
Peter Pira, Charles Univ. in Prague (Czech Republic)
Jan Wild, Charles Univ. in Prague (Czech Republic)


Published in SPIE Proceedings Vol. 9511:
Damage to VUV, EUV, and X-ray Optics V
Libor Juha; Saša Bajt; Richard London, Editor(s)

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