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Proceedings Paper

Preparation of novel HTS films and tunnel junctions for advanced C3I sensor applications
Author(s): Benjamin J. Taylor; Teresa H. Emery; Susan A. E. Berggren; Anna M. Leese de Escobar; Inho Jeon; M. Brian Maple
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Paper Abstract

Research into the development of advanced RF electronics and devices having high-Temperature Superconducting (HTS) circuitry is being carried out in the Cryogenic Exploitation of RF (CERF) laboratory at SPAWAR Systems Center (SSC) - Pacific. Recently, we have developed a novel annealing process wherein a film of YBa2Cu3Ox is produced having a gradient of oxygen composition along a given direction which we refer to as YBa2Cu3O∇x. Such samples are intended for rapid experimental investigation of the evolution of electronic properties within the compound and in combination with structurally compatible functional oxide materials as integrated sensor devices. We present here an investigation as to the extent to which local oxygen content affects the ion milling process in the formation of Josephson junctions in the HTS compound YBa2Cu3O∇x. We find an abrupt transition in the profile and depth of ion milled trenches at oxygen concentrations at and below the well ordered oxygen level, O6.72. The method described here shows good potential for use in the fabrication of large numbers of uniform Josephson junctions in films of YBa2Cu3Ox, as either a complementary processing tool for grain boundary, step edge, or ion damaged formed JJs, or as a stand alone method for producing nano-bridge JJ’s.

Paper Details

Date Published: 22 May 2015
PDF: 11 pages
Proc. SPIE 9467, Micro- and Nanotechnology Sensors, Systems, and Applications VII, 946725 (22 May 2015); doi: 10.1117/12.2178283
Show Author Affiliations
Benjamin J. Taylor, Space and Naval Warfare Systems Ctr. Pacific (United States)
Teresa H. Emery, Space and Naval Warfare Systems Ctr. Pacific (United States)
Susan A. E. Berggren, Space and Naval Warfare Systems Ctr. Pacific (United States)
Anna M. Leese de Escobar, Space and Naval Warfare Systems Ctr. Pacific (United States)
Inho Jeon, Univ. of California, San Diego (United States)
M. Brian Maple, Univ. of California, San Diego (United States)


Published in SPIE Proceedings Vol. 9467:
Micro- and Nanotechnology Sensors, Systems, and Applications VII
Thomas George; Achyut K. Dutta; M. Saif Islam, Editor(s)

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