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Proceedings Paper

Synthesis of two-dimensional materials for beyond graphene devices
Author(s): Kehao Zhang; Sarah Eichfeld; Jacob Leach; Bob Metzger; Yu-Chuan Lin; Keith Evans; Joshua A. Robinson
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Paper Abstract

In this paper, we present an overview of the currently employed techniques to synthesize two-dimensional materials, focusing on MoS2 and WSe2, and summarize the progress reported to-date. Here we discuss the importance of controlling reactor geometries to improve film uniformity and quality for MoS2 through a combination of modeling and experimental design. In addition, development of processes scalable to provide wafer scale uniformity is explored using synthesis of WSe2 via metal-organic chemical vapor deposition. Finally, we discuss the impact of each of these processes for TMD synthesis on epitaxial graphene.

Paper Details

Date Published: 22 May 2015
PDF: 10 pages
Proc. SPIE 9467, Micro- and Nanotechnology Sensors, Systems, and Applications VII, 94670O (22 May 2015); doi: 10.1117/12.2177985
Show Author Affiliations
Kehao Zhang, The Pennsylvania State Univ. (United States)
Sarah Eichfeld, The Pennsylvania State Univ. (United States)
Jacob Leach, Kyma Technologies, Inc. (United States)
Bob Metzger, Kyma Technologies, Inc. (United States)
Yu-Chuan Lin, The Pennsylvania State Univ. (United States)
Keith Evans, Kyma Technologies, Inc. (United States)
Joshua A. Robinson, The Pennsylvania State Univ. (United States)


Published in SPIE Proceedings Vol. 9467:
Micro- and Nanotechnology Sensors, Systems, and Applications VII
Thomas George; Achyut K. Dutta; M. Saif Islam, Editor(s)

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