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Proceedings Paper

A bimorph electrothermal actuator for micromirror devices
Author(s): Sergey S. Evstafyev; Sergey P. Timoshenkov; Igor M. Britkov; Vyacheslav K. Samoilykov; Anatolij M. Tereshhenko
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Paper Abstract

The research and development results along the characteristics of the micro-mirror element driven by thermal microactuator are presented. This work shows that for calculating micro-mirror element deflection is crucial for consideration the temperature distribution along the length of the micromirror element. The calculation of the superheat temperature is provided, along with the effective overheat temperature. Provided calculations are in good correlation with experimental data.

Paper Details

Date Published: 22 May 2015
PDF: 9 pages
Proc. SPIE 9467, Micro- and Nanotechnology Sensors, Systems, and Applications VII, 94672X (22 May 2015); doi: 10.1117/12.2176817
Show Author Affiliations
Sergey S. Evstafyev, National Research Univ. of Electronic Technology (Russian Federation)
Sergey P. Timoshenkov, National Research Univ. of Electronic Technology (Russian Federation)
Igor M. Britkov, National Research Univ. of Electronic Technology (Russian Federation)
Vyacheslav K. Samoilykov, National Research Univ. of Electronic Technology (Russian Federation)
Anatolij M. Tereshhenko, National Research Univ. of Electronic Technology (Russian Federation)


Published in SPIE Proceedings Vol. 9467:
Micro- and Nanotechnology Sensors, Systems, and Applications VII
Thomas George; Achyut K. Dutta; M. Saif Islam, Editor(s)

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