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Proceedings Paper

Development of small-sized accelerometer
Author(s): Sergey P. Timoshenkov; Andrey Mikheev; Alexey Timoshenkov
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Proc. SPIE 9467, Micro- and Nanotechnology Sensors, Systems, and Applications VII, 94672V; doi: 10.1117/12.2176809
Show Author Affiliations
Sergey P. Timoshenkov, National Research Univ. of Electronic Technology (Russian Federation)
Andrey Mikheev, National Research Univ. of Electronic Technology (Russian Federation)
Alexey Timoshenkov, National Research Univ. of Electronic Technology (Russian Federation)


Published in SPIE Proceedings Vol. 9467:
Micro- and Nanotechnology Sensors, Systems, and Applications VII
Thomas George; Achyut K. Dutta; M. Saif Islam, Editor(s)

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