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Proceedings Paper

Development of methodology for evaluation of subsurface damage
Author(s): D. Tomka; F. Procháska; O. Matoušek; J. Polák
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Paper Abstract

The developed method is used for subsurface damage evaluation. It is based on CNC subaperture asymmetric polishing of the surface, which leads to the formation of a wedge with decreasing depth, depending on the diameter and a subsequent analysis of the surface using White - Light Interferometry. In the evaluation, 'negative PV value' method was used enabling the detection of the depth of damage with the accuracy of 1 micron.

Paper Details

Date Published: 7 January 2015
PDF: 9 pages
Proc. SPIE 9442, Optics and Measurement Conference 2014, 94421B (7 January 2015); doi: 10.1117/12.2176024
Show Author Affiliations
D. Tomka, Institute of Plasma Physics of the AS CR, v.v.i. (Czech Republic)
F. Procháska, Institute of Plasma Physics of the AS CR, v.v.i. (Czech Republic)
O. Matoušek, Institute of Plasma Physics of the AS CR, v.v.i. (Czech Republic)
J. Polák, Institute of Plasma Physics of the AS CR, v.v.i. (Czech Republic)


Published in SPIE Proceedings Vol. 9442:
Optics and Measurement Conference 2014
Jana Kovačičinová; Tomáš Vít, Editor(s)

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