Share Email Print
cover

Proceedings Paper

Super-polishing of Zerodur aspheres by means of conventional polishing technology
Author(s): Jaroslav Polak; Eva Klepetková; Josef Pošmourný; Miroslav Šulc; František Procháska; David Tomka; Ondřej Matoušek; Ivana Poláková; Eduard Šubert
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

This paper describes a quest to find simple technique to superpolish Zerodur asphere (55μm departure from best fit sphere) that could be employed on old fashion way 1-excenter optical polishing machine. The work focuses on selection of polishing technology, study of different polishing slurries and optimization of polishing setup. It is demonstrated that either by use of fine colloidal CeO2 slurry or by use of bowl-feed polishing setup with CeO2 charged pitch we could reach 0.4nm RMS roughness while removing <30nm of surface layer. This technique, although not optimized, was successfully used to improve surface roughness on already prepolished Zerodur aspheres without necessity to involve sophisticated super-polishing technology and highly trained manpower.

Paper Details

Date Published: 7 January 2015
PDF: 10 pages
Proc. SPIE 9442, Optics and Measurement Conference 2014, 944212 (7 January 2015); doi: 10.1117/12.2175899
Show Author Affiliations
Jaroslav Polak, Institute of Plasma Physics of the AS CR, v.v.i. (Czech Republic)
Eva Klepetková, Institute of Plasma Physics of the AS CR, v.v.i. (Czech Republic)
Josef Pošmourný, Institute of Plasma Physics of the AS CR, v.v.i. (Czech Republic)
Miroslav Šulc, Institute of Plasma Physics of the AS CR, v.v.i. (Czech Republic)
František Procháska, Institute of Plasma Physics of the AS CR, v.v.i. (Czech Republic)
David Tomka, Institute of Plasma Physics of the AS CR, v.v.i. (Czech Republic)
Ondřej Matoušek, Institute of Plasma Physics of the AS CR, v.v.i. (Czech Republic)
Ivana Poláková, Institute of Plasma Physics of the AS CR, v.v.i. (Czech Republic)
Eduard Šubert, Institute of Plasma Physics of the AS CR, v.v.i. (Czech Republic)


Published in SPIE Proceedings Vol. 9442:
Optics and Measurement Conference 2014
Jana Kovačičinová; Tomáš Vít, Editor(s)

© SPIE. Terms of Use
Back to Top