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Proceedings Paper

Schottky-barrier image sensor with 100% fill factor
Author(s): Walter F. Kosonocky; Thomas S. Villani; Frank V. Shallcross; Grazyna M. Meray; John J. O'Neill
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Paper Abstract

A new concept, the Direct Schottky Injection (DSI), is described for a three-dimensional construction of infrared imagers with a continuous Schottky-barrier-detector surface on one side of a thinned (10 to 25 microns) silicon substrate and p-type buried-channel CCD readout structure on the other side. The DSI structure provides a 100-percent fill factor, a large charge-handling capacity, and a high-density pixel design. The construction and operation are described for DSI imagers with frame-transfer CCD (FT-CCD) and interline-transfer CCD(IT-CCD) readout. The operation of the IT-CCD DSI imager was demonstrated with a 128 x 128 focal plane array (FPA) with 50 x 50-micron pixels.

Paper Details

Date Published: 1 September 1990
PDF: 11 pages
Proc. SPIE 1308, Infrared Detectors and Focal Plane Arrays, (1 September 1990); doi: 10.1117/12.21717
Show Author Affiliations
Walter F. Kosonocky, New Jersey Institute of Technology (United States)
Thomas S. Villani, David Sarnoff Research Ctr. (United States)
Frank V. Shallcross, David Sarnoff Research Ctr. (United States)
Grazyna M. Meray, David Sarnoff Research Ctr. (United States)
John J. O'Neill, David Sarnoff Research Ctr. (United States)


Published in SPIE Proceedings Vol. 1308:
Infrared Detectors and Focal Plane Arrays
Eustace L. Dereniak; Robert E. Sampson, Editor(s)

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