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Proceedings Paper

Analysis of the measurement range in Fizeau phase-stepping interferometry using the moire effect
Author(s): Benito Vasquez Dorrio; Jesus Blanco-Garcia; Angel F. Doval; Jose Carlos Lopez Vazquez; R. Soto; J. L. Fernandez; Mariano Perez-Amor
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Paper Abstract

In this work, the phase evaluation of multiple-beam Fizeau interferograms is carried out by the usual phase-stepping algorithms by superimposing the interferogram on a Ronchi grid located at the interferometer image plane. The phase modulation, required for phase measurement, is obtained by translating the grid in its own plane, while a slight defocusing in the image acquisition system provides a suitable sinusoidal intensity pattern. An estimation of the measurable range of surface slopes is calculated and experiments on a spherical surface have been realized in order to analyze the validity of the obtained results.

Paper Details

Date Published: 2 August 1995
PDF: 15 pages
Proc. SPIE 2576, International Conference on Optical Fabrication and Testing, (2 August 1995); doi: 10.1117/12.215626
Show Author Affiliations
Benito Vasquez Dorrio, Univ. de Vigo (Spain)
Jesus Blanco-Garcia, Univ. de Vigo (Spain)
Angel F. Doval, Univ. de Vigo (Spain)
Jose Carlos Lopez Vazquez, Univ. de Vigo (Spain)
R. Soto, Univ. de Vigo (Spain)
J. L. Fernandez, Univ. de Vigo (Spain)
Mariano Perez-Amor, Univ. de Vigo (Spain)

Published in SPIE Proceedings Vol. 2576:
International Conference on Optical Fabrication and Testing
Toshio Kasai, Editor(s)

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