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Proceedings Paper

Optical metrology for small zone measurement
Author(s): Guan-chang Jin; Nai-Keng Bao; Po Sheun Chung
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Paper Abstract

A novel technique in optical metrology is developed for small zone measurement. The technique consists of a double lenses optical arrangement and an improved digital speckle correlation technique. This new method provides the possibility of high sensitivity for deformation measurements. A theoretical analysis and an experimental result confirmed that a 2 nm resolution can be realized. Some application examples are presented in the paper.

Paper Details

Date Published: 2 August 1995
PDF: 6 pages
Proc. SPIE 2576, International Conference on Optical Fabrication and Testing, (2 August 1995); doi: 10.1117/12.215625
Show Author Affiliations
Guan-chang Jin, Tsinghua Univ. (China)
Nai-Keng Bao, City Univ. of Hong Kong (Hong Kong)
Po Sheun Chung, City Univ. of Hong Kong (Hong Kong)


Published in SPIE Proceedings Vol. 2576:
International Conference on Optical Fabrication and Testing
Toshio Kasai, Editor(s)

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