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Proceedings Paper

Fabrication and characterization of optical super-smooth surfaces
Author(s): Dirk-Roger Schmitt; Frank Kratz; Gabriele A. Ringel; Juergen Mangelsdorf; Francois Creuzet; John D. Garratt
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Paper Abstract

Intercomparison roughness measurements have been carried out at supersmooth artefacts fabricated from BK7, fused silica, and Zerodur. The surface parameters were determined using a special prototype of the mechanical profiler Nanostep (Rank Taylor Hobson), the Optical Heterodyne Profiler Z5500 (Zygo), and an Atomic Force Microscope (Park Scientific) with an improved acquisition technique. The intercomparison was performed after the range of collected spatial wavelength for each instrument was adjusted using digital filtering techniques. It is demonstrated for different roughness ranges that are applied superpolishing techniques yield supersmooth artefacts which can be used for more intercomparisons.

Paper Details

Date Published: 2 August 1995
PDF: 7 pages
Proc. SPIE 2576, International Conference on Optical Fabrication and Testing, (2 August 1995); doi: 10.1117/12.215614
Show Author Affiliations
Dirk-Roger Schmitt, DLR Institut fuer Flugfuehrung (Germany)
Frank Kratz, DLR Institut fuer Flugfuehrung (Germany)
Gabriele A. Ringel, DLR Institut fuer Flugfuehrung (Germany)
Juergen Mangelsdorf, Rollei Fototechnic GmbH (Germany)
Francois Creuzet, Saint-Gobaine Recherche (France)
John D. Garratt, Rank Taylor Hobson Ltd. (United Kingdom)

Published in SPIE Proceedings Vol. 2576:
International Conference on Optical Fabrication and Testing
Toshio Kasai, Editor(s)

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