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Proceedings Paper

Super-smooth polishing on aspherical surfaces (II): achievement of a super-smooth polishing
Author(s): Manabu Ando; Mahito Negishi; Masafumi Takimoto; Akinobu Deguchi; Nobuo Nakamura
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Paper Abstract

This paper discusses super-smooth polishing technology for excimer lasers, soft X-rays, and other short-wavelength light applications. Short-wavelength light elements require surface quality and contour accuracy superior to traditional specifications, as well as free-form contours. For this reason, our target for free-form contours of a 500 mm diameter was set to 0.08 mm PV for contour accuracy, and 0.2 nm RMS for surface roughness. To improve surface quality we employed local pitch polishing, utilizing a flexible tool laminated with an elastic sheet, which adapts well to various contours. For greater contour accuracy, we developed the CSSP (Canon Super-Smooth Polisher), which polishes 500 mm diameter optical elements. The CSSP polishing process achieves a contour accuracy of 0.078 mm PV and a surface roughness of 0.13 nm RMS on a 500 mm diameter fused silica toroidal mirror. We also fabricated both CaF2 and CVD-SiC, materials widely used in short-wavelength light elements.

Paper Details

Date Published: 2 August 1995
PDF: 9 pages
Proc. SPIE 2576, International Conference on Optical Fabrication and Testing, (2 August 1995); doi: 10.1117/12.215613
Show Author Affiliations
Manabu Ando, Canon Inc. (Japan)
Mahito Negishi, Canon Inc. (Japan)
Masafumi Takimoto, Canon Inc. (Japan)
Akinobu Deguchi, Canon Inc. (Japan)
Nobuo Nakamura, Canon Inc. (Japan)

Published in SPIE Proceedings Vol. 2576:
International Conference on Optical Fabrication and Testing
Toshio Kasai, Editor(s)

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