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Proceedings Paper

Interferometry for measuring large aspherical surfaces with holographic optical elements made by two steps
Author(s): Takashi Mizobuchi; Hiroaki Ueda; Toshihiro Kubota; Eiji Shimizu
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Paper Abstract

Interferometry with a holographic optical element for measuring the shape of large aspherical surfaces is reported. The interference fringe pattern between a parallel reference beam and a reconstructed wavefront from a master zone plate which has a very precise pattern drawn by an electron beam drawing machine is recorded on a hologram plate with an off-axis optical arrangement. The hologram plate used as the standard element is reconstructed by the conjugate beam in a modified Twyman-Green interferometer. Insufficient parallelism of commercial hologram plates and the difference in reflection ratio between a sample and the reference mirror can be compensated by this method. Not only rotationally symmetric lenses but also nonrotationally symmetric samples are available. It is also easy to make replicas. Some experimental results are also presented.

Paper Details

Date Published: 2 August 1995
PDF: 5 pages
Proc. SPIE 2576, International Conference on Optical Fabrication and Testing, (2 August 1995); doi: 10.1117/12.215608
Show Author Affiliations
Takashi Mizobuchi, Kyoto Institute of Technology (Japan)
Hiroaki Ueda, Labs. of Image Information Science and Technology (Japan)
Toshihiro Kubota, Kyoto Institute of Technology (Japan)
Eiji Shimizu, Labs. of Image Information Science and Technology (Japan)


Published in SPIE Proceedings Vol. 2576:
International Conference on Optical Fabrication and Testing
Toshio Kasai, Editor(s)

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