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Proceedings Paper

Straightness measurement using laser beam straight datum
Author(s): Junichi Uchikoshi; Shoichi Shimada; Naoya Ikawa; Akio Komura
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Paper Abstract

Using the direction stabilized laser beam as a physical straight datum, instead of the tangible reference surface, a method is proposed for the measurement of an error motion of a slide table and/or surface profile of mechanical components. A specially designed 2D position sensor/compensator for laser beam center is developed combining a quadrant photo-diode (QPD) position sensor for beam center and the piezo-compensator which compensates the beam shift from the center of QPD. By the use the sensor/compensator proposed, the positional and angular fluctuations of laser beam path is evaluated with nanometric resolution. Combining the sensor with the piezo-driven mirror compensator, the directional stabilizer for the laser beam is also designed in the same manner as the sensor/compensator. The stabilized He-Ne laser beam can be used as the metrological datum of straightness within the accuracy of 2 X 10 -8 rad. By mounting the position sensor/compensator on a slide table, the carriage with working distance of 1 m is so designed and built as to move straight along the stabilized laser beam. The carriage can be used as a mechanical straight datum with the accuracy equivalent to the laser beam stability.

Paper Details

Date Published: 2 August 1995
PDF: 8 pages
Proc. SPIE 2576, International Conference on Optical Fabrication and Testing, (2 August 1995); doi: 10.1117/12.215602
Show Author Affiliations
Junichi Uchikoshi, Osaka Univ. (Japan)
Shoichi Shimada, Osaka Univ. (Japan)
Naoya Ikawa, Osaka Univ. (Japan)
Akio Komura, Osaka Univ. (Japan)


Published in SPIE Proceedings Vol. 2576:
International Conference on Optical Fabrication and Testing
Toshio Kasai, Editor(s)

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