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Proceedings Paper

Quantitative surface evaluation using a synchronous Nomarski microscope
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Paper Abstract

A simple zonal approach is proposed for estimating phase distribution on large grids. The estimation is based on phase differences that are precisely measured in two orthogonal directions by a lateral shearing interferometer. It requires only O(N2) operations for reconstructing a phase distribution on a N by N grid. Computer simulation and experimental results are demonstrated to show effectiveness of the new algorithm.

Paper Details

Date Published: 2 August 1995
PDF: 7 pages
Proc. SPIE 2576, International Conference on Optical Fabrication and Testing, (2 August 1995); doi: 10.1117/12.215589
Show Author Affiliations
Xinkang Tian, Univ. of Tsukuba (United States)
Masahide Itoh, Univ. of Tsukuba (Japan)
Toyohiko Yatagai, Univ. of Tsukuba (Japan)


Published in SPIE Proceedings Vol. 2576:
International Conference on Optical Fabrication and Testing
Toshio Kasai, Editor(s)

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