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Proceedings Paper

Optical approach for LCD inspection
Author(s): Shigeki Terada; Yasuo Shono
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Paper Abstract

Optical inspection technology is very fundamental for TFT (thin film transistor) array and cell processes of the LCD (liquid crystal display) manufacturing which is utilized in IQC (in-line quality control) process. This paper describes a general overview about LCD inspection items and our requirements, and show some optical technology for those inspection items.

Paper Details

Date Published: 2 August 1995
PDF: 10 pages
Proc. SPIE 2576, International Conference on Optical Fabrication and Testing, (2 August 1995); doi: 10.1117/12.215582
Show Author Affiliations
Shigeki Terada, Toshiba Corp. (Japan)
Yasuo Shono, Toshiba Corp. (Japan)

Published in SPIE Proceedings Vol. 2576:
International Conference on Optical Fabrication and Testing
Toshio Kasai, Editor(s)

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