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Proceedings Paper

Soft x-ray optics for synchrotron radiation
Author(s): Takeshi Namioka; Masato Koike; Hiroo Kinoshita; Tsuneyuki Haga
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Paper Abstract

A new simulation method has been developed for evaluating the performance of soft x-ray optics for synchrotron radiation (SR) and for estimating tolerances for the fabrication and assembly errors of optics. The method is based on ray tracing and takes into account the surface figure error, thermal deformation, and SR source parameters. The method is applicable to aspheric mirrors and gratings with or without varied spacing and curved grooves. To evaluate the method, we applied it to the following two optical systems: (1) a Monk- Gillieson type monochromator on an undulator beamline of a third-generation SR source and (2) an extreme ultraviolet projection lithography system for SR from a superconducting compact electron storage ring. The results indicate that the method seems to provide realistic tolerances for the figure error (due to both polishing and heat load) and evaluation of the system performance, though more experimental data are needed to establish the validity of the method.

Paper Details

Date Published: 2 August 1995
PDF: 11 pages
Proc. SPIE 2576, International Conference on Optical Fabrication and Testing, (2 August 1995); doi: 10.1117/12.215581
Show Author Affiliations
Takeshi Namioka, Office of Naval Research (Japan)
Masato Koike, Lawrence Berkeley National Lab. (United States)
Hiroo Kinoshita, NTT LSI Labs. (Japan)
Tsuneyuki Haga, NTT LSI Labs. (Japan)

Published in SPIE Proceedings Vol. 2576:
International Conference on Optical Fabrication and Testing
Toshio Kasai, Editor(s)

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