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Proceedings Paper

Application of a diffractive lens element to a lithographic projection lens
Author(s): Hitoshi Ohashi; Keiichi Kuba; Toshiro Okamura; Tetsuya Ishii; Yasuhiro Kamihara
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Paper Abstract

Reported in this paper are our experimental studies which were made to ensure the feasibility of applying a diffractive lens element to a lithographic projection lens. The studies include lens design, diffractive element fabrication and the method, exposure experiments and the results, and some analysis of the results. It can be concluded from the results that the application is possible although improving the diffraction efficiency of the diffractive element is a significant issue for practical use.

Paper Details

Date Published: 27 July 1995
PDF: 7 pages
Proc. SPIE 2577, International Conference on Applications of Optical Holography, (27 July 1995); doi: 10.1117/12.215307
Show Author Affiliations
Hitoshi Ohashi, Olympus Optical Co., Ltd. (Japan)
Keiichi Kuba, Olympus Optical Co., Ltd. (Japan)
Toshiro Okamura, Olympus Optical Co., Ltd. (Japan)
Tetsuya Ishii, Olympus Optical Co., Ltd. (Japan)
Yasuhiro Kamihara, Olympus Optical Co., Ltd. (Japan)


Published in SPIE Proceedings Vol. 2577:
International Conference on Applications of Optical Holography
Toshio Honda, Editor(s)

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