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Proceedings Paper

Laser conditioning of LaF3/MgF2 dielectric coatings for excimer lasers
Author(s): Norbert Kaiser; Bernhard Anton; H. Jaenchen; Klaus R. Mann; Eric Eva; C. Fischer; Rainer Henking; Detlev Ristau; Peter Weissbrodt; Dirk Mademann; L. Raupach; Erich J. Hacker
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Paper Abstract

LaF3/MgF2-dieletric thin film combinations can be applied in optics for wavelengths down to 150 nm. Several such HR systems for a wavelength of 248 nm were investigated. In these coatings, the influence of laser conditioning on damage threshold and absorptivity was found to be remarkable. XPS- and TEM-investigations showed that the conditioning effect is related to structural and stoichiometric changes in the multilayers, especially in the near-surface-sublayers.

Paper Details

Date Published: 14 July 1995
PDF: 10 pages
Proc. SPIE 2428, Laser-Induced Damage in Optical Materials: 1994, (14 July 1995); doi: 10.1117/12.213762
Show Author Affiliations
Norbert Kaiser, Fraunhofer-Institut fuer Angewandte Optik und Feinmechanik Jena (Germany)
Bernhard Anton, Fraunhofer Institut fuer Angewandte Optik und Feinmechanik (Germany)
H. Jaenchen, Fraunhofer Institut fuer Angewandte Optik und Feinmechanik Jena (Germany)
Klaus R. Mann, Laser-Lab. Goettingen eV (Germany)
Eric Eva, Laser Lab. Goettingen eV (Germany)
C. Fischer, Laser Lab. Goettingen eV (Germany)
Rainer Henking, Laser Zentrum Hannover eV (Germany)
Detlev Ristau, Laser Zentrum Hannover eV (Germany)
Peter Weissbrodt, Jenoptik Technologie GmbH (Germany)
Dirk Mademann, Jenoptik Technologie GmbH (Germany)
L. Raupach, Jenoptik Technologie GmbH (Germany)
Erich J. Hacker, Jenoptik Technologie GmbH (Germany)


Published in SPIE Proceedings Vol. 2428:
Laser-Induced Damage in Optical Materials: 1994
Harold E. Bennett; Arthur H. Guenther; Mark R. Kozlowski; Brian Emerson Newnam; M. J. Soileau, Editor(s)

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