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Proceedings Paper

Highly damage resistant cavity optics for excimer lasers
Author(s): Nikolay V. Morozov; Spartak I. Sagitov; V. S. Barabanov
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Paper Abstract

This paper reviews the experimental works dedicated to the development of mirrors and antireflection coatings for the UV spectrum range carried out in the Quantum Radiophysics Division of P.N. Lebedev Physical Institute, Russian Academy of Sciences. The methods of obtaining the single-layer and multilayer optical coatings are given. The effect of the optical coating construction as well as various technological factors of coating process on damage threshold and chemical stability of mirrors is investigated.

Paper Details

Date Published: 14 July 1995
PDF: 10 pages
Proc. SPIE 2428, Laser-Induced Damage in Optical Materials: 1994, (14 July 1995); doi: 10.1117/12.213746
Show Author Affiliations
Nikolay V. Morozov, P.N. Lebedev Physical Institute (Russia)
Spartak I. Sagitov, P.N. Lebedev Physical Institute (Russia)
V. S. Barabanov, P.N. Lebedev Physical Institute (Russia)


Published in SPIE Proceedings Vol. 2428:
Laser-Induced Damage in Optical Materials: 1994
Harold E. Bennett; Arthur H. Guenther; Mark R. Kozlowski; Brian Emerson Newnam; M. J. Soileau, Editor(s)

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