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Proceedings Paper

Total internal reflection microscopy (TIRM) as a nondestructive subsurface damage assessment tool
Author(s): Zhi M. Liao; Simon J. Cohen; John R. Taylor
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Paper Abstract

An easy to use, nondestructive method for evaluating subsurface damage in polished substrates has been established at LLNL. Subsurface damage has been related to laser damage in coated optical components used in high power, high repetition rate laser systems. Total Internal Reflection Microscopy (TIRM) has been shown to be a viable nondestructive technique in analyzing subsurface damage in optical components. A successful TIRM system has been established for evaluating subsurface damage on fused silica components. Laser light scattering from subsurface damage sites is collected through a Nomarski microscope. These images are then captured by a CCD camera for analysis on a computer. A variety of optics, including components with intentional subsurface damage due to grinding and polishing, have been analyzed and their TIRM images compared to an existing destructive etching method. Methods for quantitative measurement of subsurface damage are also discussed.

Paper Details

Date Published: 14 July 1995
PDF: 11 pages
Proc. SPIE 2428, Laser-Induced Damage in Optical Materials: 1994, (14 July 1995); doi: 10.1117/12.213733
Show Author Affiliations
Zhi M. Liao, Lawrence Livermore National Lab. (United States)
Simon J. Cohen, Lawrence Livermore National Lab. (United States)
John R. Taylor, Lawrence Livermore National Lab. (United States)


Published in SPIE Proceedings Vol. 2428:
Laser-Induced Damage in Optical Materials: 1994
Harold E. Bennett; Arthur H. Guenther; Mark R. Kozlowski; Brian Emerson Newnam; M. J. Soileau, Editor(s)

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