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Proceedings Paper

High-reflectance coatings and materials for the extreme ultraviolet
Author(s): Ritva A. M. Keski-Kuha; John F. Osantowski; Gerry M. Blumenstock; Jeffrey S. Gum; Charles M. Fleetwood; Douglas B. Leviton; Timo T. Saha; John G. Hagopian; June L. Tveekrem; Geraldine A. Wright
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Paper Abstract

Advances in optical coating and materials technology have made possible the development of instruments with substantially improved efficiency in the extreme ultraviolet/far ultraviolet (EUV/FUV) spectral region. For example, the development of chemical vapor deposited (CVD) SiC mirrors provides an opportunity to extend the range of normal incidence instruments down to 60 nm. The EUV performance and some applications of optical coatings including MgG2 protected aluminum, CVD- SiC, SiC films, boron carbide films, and multilayer coatings will be discussed. Contamination sensitivity and cleaning will be addressed.

Paper Details

Date Published: 14 July 1995
PDF: 13 pages
Proc. SPIE 2428, Laser-Induced Damage in Optical Materials: 1994, (14 July 1995); doi: 10.1117/12.213712
Show Author Affiliations
Ritva A. M. Keski-Kuha, NASA Goddard Space Flight Ctr. (United States)
John F. Osantowski, NASA Goddard Space Flight Ctr. (United States)
Gerry M. Blumenstock, NASA Goddard Space Flight Ctr. (United States)
Jeffrey S. Gum, NASA Goddard Space Flight Ctr. (United States)
Charles M. Fleetwood, NASA Goddard Space Flight Ctr. (United States)
Douglas B. Leviton, NASA Goddard Space Flight Ctr. (United States)
Timo T. Saha, NASA Goddard Space Flight Ctr. (United States)
John G. Hagopian, NASA Goddard Space Flight Ctr. (United States)
June L. Tveekrem, NASA Goddard Space Flight Ctr. (United States)
Geraldine A. Wright, NASA Goddard Space Flight Ctr. (United States)


Published in SPIE Proceedings Vol. 2428:
Laser-Induced Damage in Optical Materials: 1994
Harold E. Bennett; Arthur H. Guenther; Mark R. Kozlowski; Brian Emerson Newnam; M. J. Soileau, Editor(s)

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